Ion Sources for High Energy Ion Implantation at BNL
Ion source photo and phosphorous ion current spectrum for MeV Implanters. Order of magnitude improvement in currents of P2+, P3+, and P4+ over state-of-the-art was obtained.
Spectrum and photo of an ion source generating High Fraction Boron Ion Source for Ion Implantation. 70% boron fraction represents a factor of 3.5