Ion Sources for High Energy Ion Implantation at BNL
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Ion source photo and phosphorous ion current spectrum for MeV Implanters. Order of magnitude improvement in currents of P2+, P3+, and P4+ over state-of-the-art was obtained.
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Spectrum and photo of an ion source generating High Fraction Boron Ion Source for Ion Implantation. 70% boron fraction represents a factor of 3.5